ADVANCES IN MICROELECTROMECHANICAL SYSTEMS

Abstract

Microelectromechanical systems (MEMS) are integratedmicrodevices or systems combining electrical and mechanical components. The mechanical microcomponents either move inresponse to certain stimuli (sensors) or are initiated to performcertain tasks (actuators). The microelectronic components areused to control that motion or to obtain information from that motion. These systems can sense, control, actuate, and function individually or in arrays to generate effects on the microscale.These are fabricated using integrated circuit (IC) batch processing techniques making it possible to realise the complete systemon a chip. The miniaturisation of mechanical components bringsthe same benefit to mechanical systems that microfabrication brings to electronics. In a broader sense, technologies associatedwith MEMS include smart materials (e.g. shape memory alloys,ferroelectrics) and processes required to make MEMS components, integration of components to make MEMS devices (sensors,actuators, etc.) and applications that use MEMS devices. The MEMS are considered as building blocks for complex microrobots performing a variety of tasks and are used to make system swhich function very close to biological systems existing in nature.

Defence Science Journal, 2009, 59(6), pp.555-556, DOI:http://dx.doi.org/10.14429/dsj.59.1579