Deformable Membrane Mirror for Wavefront Correction (Short Communication)

  • Amita Gupta Solid State Physics Laboratory, Delhi
  • Shailesh Kumar Solid State Physics Laboratory, Delhi
  • Ranvir Singh Solid State Physics Laboratory, Delhi
  • Monika Chaudhary Solid State Physics Laboratory, Delhi
  • A. K. Meena Solid State Physics Laboratory, Delhi
  • V. K. Sarvanan Solid State Physics Laboratory, Delhi
Keywords: Deformable membrane mirrors, adaptive mirrors, wavefront correction, micromachined deformable mirrors, microelectromechanical systems, adaptive optical systems

Abstract

Deformable or adaptive mirrors are used in modern adaptive optics systems for direct correction of the aberrations in the light wavefront. Conventional deformable mirrors used for this purpose are expensive electromechanical devices. Deformable membrane mirror fabricated using microelectromechanical systems (MEMS) technology is a low cost, compact adaptive optical element for correction of the lower-order optical aberrations such as defocus and astigmatism. In this paper, important aspects of device design and simulation, fabrication techniques, and test results are discussed.
Defence Science Journal, 2009, 59(6), pp.590-594, DOI:http://dx.doi.org/10.14429/dsj.59.1563
Published
2009-11-01
How to Cite
Gupta, A., Kumar, S., Singh, R., Chaudhary, M., Meena, A., & Sarvanan, V. (2009). Deformable Membrane Mirror for Wavefront Correction (Short Communication). Defence Science Journal, 59(6), 590-594. https://doi.org/10.14429/dsj.59.1563