Microscopic TV Holography for Microsystems Metrology
Keywords:
TV holography and Interferometry, Microsystems, Metrology
Abstract
Published
2011-08-30
How to Cite
Kumar, U., Somasundaram, U., Kothiyal, M., & Mohan, N. (2011). Microscopic TV Holography for Microsystems Metrology. Defence Science Journal, 61(5), 491-498. https://doi.org/10.14429/dsj.61.908
Section
Research Papers
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