Microscopic TV Holography for Microsystems Metrology

Upputuri Paul Kumar; U. Somasundaram; M. P. Kothiyal; Nandigana Krishna Mohan

doi:10.14429/dsj.61.908

Upputuri Paul Kumar Indian Institute of Technology Madras, Chennai
U. Somasundaram Indian Institute of Technology Madras, Chennai
M. P. Kothiyal Indian Institute of Technology Madras, Chennai
Nandigana Krishna Mohan Indian Institute of Technology Madras, Chennai

DOI: https://doi.org/10.14429/dsj.61.908

Keywords: TV holography and Interferometry, Microsystems, Metrology

Abstract

Author Biographies

Upputuri Paul Kumar, Indian Institute of Technology Madras, Chennai

Dr Paul Kumar Upputuri received PhD (Physics) from Indian Institute of Technology (IIT) Madras, Chennai. He has published 35 papers in journals and conference proceeding. His research interests include: Optical engineering, MEMS metrology, image/signal processing, speckle techniques, optical imaging, multiple-wavelength techniques. He is a Fellow of SPIE, OSA, Indian Laser association, and Optical Society of Indian (OSI).

U. Somasundaram, Indian Institute of Technology Madras, Chennai

Mr U. Somasundaram obtained Diploma (Mech. Engg.) from CPT College, Chennai. Currently working as a Senior Technician, Department of Physics, IIT Madras, Chennai. He actively participates in various research and development activities in the fields of interferometry and holography, optical instrumentation, and opto-mechanics.

M. P. Kothiyal, Indian Institute of Technology Madras, Chennai

Dr M.P. Kothiyal obtained his MTech (Applied Optics) from IIT, Delhi, in 1968, and PhD from IIT Madras, Chennai in 1977. Currently working as a Professor in the Department of Physics, IIT Madras, Chennai. His research areas are optical instrumentation and testing, interferometry, speckle methods, and polarisation. He has published more than 100 papers in journals and a similar number in conference proceedings and coauthored a book. He has coordinated several projects funded by research and development agencies. He is a Fellow of SPIE, OSA and OSI.

Nandigana Krishna Mohan, Indian Institute of Technology Madras, Chennai

Dr Nandigana Krishna Mohan received his MSc(Tech) (Applied Phy.) from Andhra University, Waltair; MS (Engg) and PhD (Mech. Engg) in IIT Madras, Chennai. Currently he is working as Senior Scientific Officer Gr.1 at IIT Madras, Chennai. His research areas include: Holographic/speckle and speckle shear interferometry, TV holography and shearography, digital speckle photography, holographic optical elements, stereovision systems and optical metrology using photo-refractive materials. He has published and presented around 155 papers and wrote three book chapters. He is a Fellow member of OSI and SPIE.