Micromachining for Microelectromechanical Systems
AbstractThe various micromachining processes required for micro engineering and for the successful realisation of micro eletro mechanical systems on Si are presented. The techniques presented include bulk and surface micro machining, Si fusion bonding, and the lithography, electroforming and micromoulding (LIGA) process. The paper also includes discussion on the markets, applications and future trends for micro enginerated products.
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