Micromachining for Microelectromechanical Systems

  • K.N. Bhat Indian Institute of Technology, Chennai
Keywords: Micromoulding (LIGA) process, Microelectromechanical

Abstract

The various micromachining processes required for micro engineering and for the successful realisation of micro eletro mechanical systems on Si are presented. The techniques presented include bulk and surface micro machining, Si fusion bonding, and the lithography, electroforming and micromoulding (LIGA) process. The paper also includes discussion on the markets, applications and future trends for micro enginerated products.

Author Biography

K.N. Bhat, Indian Institute of Technology, Chennai
Dr KN Bhat obtained his MTech (Electrical Engineering) from Indian Institute of Technology (IIT),Madras, MEng (Electrophysics and Electronic Engineering) from R.P.I., Troy, New York, and PhD(Electrical Engg. ) from IIT , Madras. Presently. he is working as Professor, Electrical Engineering atlIT, Madras and is also coordinating the microelectronics and microengineering research activity.Areas of his research include Si and GaAs device technology & modelling, SOl MOSFETs  foroperation in radiation environment, polysilicon thin film transistors, GaAs and InP surfacepassivation and MISFETs, micromachined sensors using Si. He has published more than hundred technical papers, successfully completed several sponsored projects and guided graduate level projects, MS and .PhD Theses. He is a life member of Semiconductor Society of India, Material Research Society of India and a founder member of the VLSI Society of India.

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Published
2013-01-01
How to Cite
Bhat, K. (2013). Micromachining for Microelectromechanical Systems. Defence Science Journal, 48(1), 5-19. https://doi.org/10.14429/dsj.48.3863