Research on A Novel Reliable MEMS Bistable Solid State Switch

  • Bo He National Key Laboratory of Electro-Mechanics Engineering and Control, School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, China https://orcid.org/0000-0002-5943-8811
  • Wenzhong Lou National Key Laboratory of Electro-Mechanics Engineering and Control, School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, China
  • Hengzhen Feng National Key Laboratory of Electro-Mechanics Engineering and Control, School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, China
  • Yuecen Zhao National Key Laboratory of Electro-Mechanics Engineering and Control, School of Mechatronical Engineering, Beijing Institute of Technology, Beijing - 100081, China
Keywords: Experimental methods, Heat conduction theory, MEMS-bS3, MEMS solid-state fuze, Simulation

Abstract

As a result of the unpredictable nature of extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for a MEMS solid-state switch (MEMS-S3). In particular, this switch must remain stable without any energy input after a state transition (i.e., it must be bistable). In this paper, a MEMS bistable solid-state switch (MEMS-bS3) is designed that is based on the concept of producing a micro-explosion. The reliable state switching of the MEMS-bS3 is studied via heat conduction theory and verified via both simulations and experimental methods. The experimental results show that these switches can produce micro-explosions driven by 33 V/47 μF pulse energy. However, the metal film bridge (MFB) structures used in this switch with smaller dimensions (80×20 μm2, 90×30 μm2, and 100×40 μm2) could not enable the switch to realize a reliable state transition, and the state transition rate was less than 40%. When the MFB dimensions reached 120×60 μm2 or 130×70 μm2, the state transition rate exceeded 80%, and the response time was on the μs-scale.

Published
2022-08-26
How to Cite
He, B., Lou, W., Feng, H., & Zhao, Y. (2022). Research on A Novel Reliable MEMS Bistable Solid State Switch. Defence Science Journal, 72(4), 609-617. https://doi.org/10.14429/dsj.72.17800
Section
Materials Science & Metallurgy