Meshless Analysis of Radio Frequency Microelectromechanical Systems Shunt Switch

Authors

  • S. Kanthamani Thiagarajar College of Engineering, Madurai
  • S. Vijay Mohan Bigtec Private Limited, Bangalore
  • S. Raju Thiagarajar College of Engineering, Madurai
  • V. Abhaikumar Thiagarajar College of Engineering, Madurai
  • V. Mohan Thiagarajar College of Engineering, Madurai

DOI:

https://doi.org/10.14429/dsj.59.1567

Keywords:

MEMS devices, meshless analysis methods, RF MEMS switches, shunt switches, RF MEMS technology, military communication, coplaner waveguide platform, reproducing kernel particle method, RKPM

Abstract

Microelectromechanical systems (MEMS) have found applications in defence as well as in civilian sectors. Analysis of MEMS devices require complex 3-D meshes due to the presence of mechanical and electrostatic energy domains. On the other hand, meshless methods do not require the generation of mesh and perform the computational analysis by just sprinkling the points covering the domain. In this paper, meshless analysis of MEMS switches based on reproducing kernel particle method is reported. Numerical results for the static analysis of the switch are compared with the simulated results obtained using  INTELLISUITE MEMS CAD tool.

Defence Science Journal, 2009, 59(6), pp.622-626, DOI:http://dx.doi.org/10.14429/dsj.59.1567

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Published

2009-11-01

How to Cite

Kanthamani, S., Mohan, S. V., Raju, S., Abhaikumar, V., & Mohan, V. (2009). Meshless Analysis of Radio Frequency Microelectromechanical Systems Shunt Switch. Defence Science Journal, 59(6), 622–626. https://doi.org/10.14429/dsj.59.1567

Issue

Vol. 59 No. 6: Advances in Microelectromechanical Systems

Section

Special Issue Papers

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