Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration (Review Papers)

  • H. Saha Jadavpur University, Kolkata-700 032
  • C. Roy Chaudhuri Bengal Engineering and Science University, Shibpur, Howrah-711 103
Keywords: CMOS, microelectromechanical system, MEMS, sensors, RF MEMS, integrated design, CMOS-MEMS integrated systems

Abstract

A review of the integration of the complementry metal oxide semiconductors (CMOS) circuit with the microelectromechanical systems (MEMS) structures for sensing and RF applications has been presented. Specifically, the integrated mechanical sensors, chemical gas sensors, and biochemical sensors have been discussed. Application of MEMS as switches, varactors, and inductors and their integration in RF circuits has also been highlighted. The fabrication and design challenges for the CMOS-MEMS integration have been described. A new design methodology for integration of thermal effects in an integrated pressure sensor has been proposed.

Defence Science Journal, 2009, 59(6), pp.557-567, DOI:http://dx.doi.org/10.14429/dsj.59.1560

Published
2009-11-01
How to Cite
Saha, H., & Roy Chaudhuri, C. (2009). Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration (Review Papers). Defence Science Journal, 59(6), 557-567. https://doi.org/10.14429/dsj.59.1560