Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications

  • R. Agarwal Department of Physics and Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani
  • R. Mukhiya MEMS and Microsensors Group, CSIR-Central Electronics Engineering Research Institute, Pilani
  • R. Sharma MEMS and Microsensors Group, CSIR-Central Electronics Engineering Research Institute, Pilani
  • M.K. Sharma Defence Research and Development Establishment, Gwalior
  • A.K. Goel Defence Research and Development Establishment, Gwalior
Keywords: Label-free, bio-sensing, bulk micromachining, micro-cantilever, piezoresistor

Abstract

Micro-electro-mechanical systems (MEMS)-based cantilever platform have capability for the detection of chemical and biological agents. This paper reports about the finite element method (FEM) based design and simulations of MEMS-based piezoresistor cantilever platform to be used for detection of chemical and biological toxic agents. Bulk micromachining technique is adopted for the realisation of the device structure. MEMS piezoresistive biosensing platforms are having potential for a field-based label-free detection of various types of bio-molecules. Using the MEMMECH module of CoventorWare® simulations are performed on the designed model of the device and it is observed that principal stress is maximum along the length (among other dimensions of the micro-cantilever) and remains almost constant for 90 per cent of the length of the micro-cantilever. The dimensions of piezoresistor are optimised and the output voltage vs. stress analysis for various lengths of the piezoresistor is performed using the MEMPZR module of the CoventorWare®.

Author Biographies

R. Agarwal, Department of Physics and Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani
Mr Rishabh Agarwal is pursuing his dual undergraduate degree in Electrical & Electronics and Physics at Birla Institute of Technology and Science, Pilani. He has been Indian Academy of Science, Summer Research Fellow (2016) at Bhabha Atomic Research Centre, Mumbai. His research interests include : Bio-MEMS, image processing and embedded system design.
R. Mukhiya, MEMS and Microsensors Group, CSIR-Central Electronics Engineering Research Institute, Pilani
Dr Ravindra Mukhiya received the PhD from IIT, Kharagpur, India, in 2010 and currently working as a Scientist at CSIR-Central Electronics Engineering Research Institute, Pilani. He is involved in the development of MEMS inertial sensors and FET-based pH sensing platforms for biomedical applications.
R. Sharma, MEMS and Microsensors Group, CSIR-Central Electronics Engineering Research Institute, Pilani
Dr Rishi Sharma received his PhD from Jiwaji University, Gwalior, India, in 2009. He is working as Scientist at MEMS and Microsensor group of CSIR-CEERI Pilani, India. He has published 30 research papers in various international/national journals and conferences, and one book chapter. His current research activity includes ion-sensitive field-effect transistors (ISFETs) and micro-cantilever-based sensors for chemical and biological sensors.
M.K. Sharma, Defence Research and Development Establishment, Gwalior
Dr M.K. Sharma obtained his MSc from University of Rajasthan, Jaipur and PhD from Jiwaji University, Gwalior. He is working as Scientist at DRDE, Gwalior. He was conferred the DRDO Young Scientist Award for the year 2008; and DRDO Technology Group Award for the year 2006, 2011 and 2015. He has published more than 20 research papers in journals of repute. He is presently working on synthesis of nanomaterials, quantum dots and development of electrochemical biosensors for biological warfare agents.
A.K. Goel, Defence Research and Development Establishment, Gwalior
Dr A.K. Goel obtained his MSc and PhD from CCS Haryana Agricultural University, Hisar. Currently working as Scientist ‘F’ at DRDE, Gwalior. He was conferred several awards including the AMI Young Scientist Award-1999, DRDO Laboratory Scientist of the Year’ award-2004, DRDO Young Scientist Award-2005, DRDO Technology Group Award-2006 & 2015, DBT Overseas Associateship-2008 and DRDO Technology Day Oration Award-2013. He is presently engaged in development of molecular and immunological systems for bio-threat agents.
Published
2016-09-30
How to Cite
Agarwal, R., Mukhiya, R., Sharma, R., Sharma, M., & Goel, A. (2016). Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications. Defence Science Journal, 66(5), 485-488. https://doi.org/10.14429/dsj.66.10702