Kumar S, Malik A, Rawal DS, Vinayak S, Malik H. Performance Analysis of GaN/AlGaN HEMTs Passivation using Inductively Coupled Plasma Chemical Vapour Deposition and Plasma Enhanced Chemical Vapour Deposition Techniques. Def. Sc. J. [Internet]. 2018 Oct. 31 [cited 2025 Jun. 14];68(6):572-6. Available from: https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/12329