Saha H, Roy Chaudhuri C. Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration (Review Papers). Def. Sc. J. [Internet]. 2009 Nov. 1 [cited 2025 Jun. 16];59(6):557-6. Available from: https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/1560