Saha, H., and C. Roy Chaudhuri. “Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration (Review Papers)”. Defence Science Journal 59, no. 6 (November 1, 2009): 557-567. Accessed May 16, 2022. https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/1560.