KAMAT, S. V. Experimental Techniques for the Measurement of Mechanical Properties of Materials Used in Microelectromechanical Systems. Defence Science Journal, [S. l.], v. 59, n. 6, p. 605–615, 2009. DOI: 10.14429/dsj.59.1565. Disponível em: https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/1565. Acesso em: 16 jul. 2025.