KAL, S.; DAS, S.; LAHIRI, S. K. Silicon Membranes for Smart Silicon Sensors . Defence Science Journal, [S. l.], v. 48, n. 4, p. 423–431, 2013. DOI: 10.14429/dsj.48.3969. Disponível em: https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/3969. Acesso em: 6 jul. 2025.