BHAT, K. Micromachining for Microelectromechanical Systems. Defence Science Journal, [S. l.], v. 48, n. 1, p. 5–19, 2013. DOI: 10.14429/dsj.48.3863. Disponível em: https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/3863. Acesso em: 18 aug. 2025.