SAHA, H.; ROY CHAUDHURI, C. Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration (Review Papers). Defence Science Journal, [S. l.], v. 59, n. 6, p. 557–567, 2009. DOI: 10.14429/dsj.59.1560. Disponível em: https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/1560. Acesso em: 16 jun. 2025.