@article{Kal_2007, title={Microelectromechanical Systems and Microsensors (Review Paper)}, volume={57}, url={https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/1762}, DOI={10.14429/dsj.57.1762}, number={3}, journal={Defence Science Journal}, author={Kal, Santiram}, year={2007}, month={May}, pages={209-224} }