@article{Saha_Roy Chaudhuri_2009, title={Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration (Review Papers)}, volume={59}, url={https://publications.drdo.gov.in/ojs/index.php/dsj/article/view/1560}, DOI={10.14429/dsj.59.1560}, number={6}, journal={Defence Science Journal}, author={Saha, H. and Roy Chaudhuri, C.}, year={2009}, month={Nov.}, pages={557-567} }