 | ion beam milling |
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 | Ion Beam Based Techniques for Mercury Cadmium Telluride Infrared Detectors
Author : Pal, R;Mittal, Vandna;Sharma, R. K;Basu, P. K
Source : Defence Science Journal ; Vol:59(4) ; 2009 ; pp 395-400
Subject : 53 Applied Physics
Keywords : Infrared detectors;mercury-cadmium-telluride detectors;ion implantation;ion beam milling;detector fabrications;IR detectors;reactive ion itching;etching processes
Abstract : The paper reviews the applications of ion beam-based techniques such as ion implantation and ion beam milling, for HgCdTe detector fabrication. Fabrication of large-format arrays and two-color arrays necessitate the use of dry processes. Ion irradiation causes type conversion in HgCdTe. The type conversion is far beyond the damage sites because of Hg in-diffusion to interstitial sites. The dry processes combine high anisotropy, faster etch rates, and better dimensional control, than wet etch processes, but require the damaged region to be removed. |
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